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Structural Stoichiometry and Phase Transitions of MoO3 Thin Films for Solid State Microbatteries

Author Affiliations

  • 1Department of Physics, Andhra Loyola College, Vijayawada - 520 008, INDIA
  • 2 Department of Physics, Maris Stella College, Vijayawada - 520 008, INDIA
  • 3 Department of Physics, Engineering College Bikaner, Bikaner – 334004, INDIA

Res. J. Recent Sci., Volume 2, Issue (4), Pages 67-73, April,2 (2013)


MoO3 is a potential material because of its wide range of stoichiometry with interesting behaviour, which includes chromogenic and catalytic properties. This leads to the applications in electrochromic display devices, optical memories, gas sensors and lithium batteries. The substochiometric films MoO3-x with oxygen deficient contain excess metal atoms which act as doping centers; these centers control the electrical and optical film properties. The orthorhombic phase (α-MoO3) has a layered structure, which consists of double layers of MoO6 octahedra held together by covalent forces in the (100) and (001) directions but by Van der Waals forces in the (010) direction. There are several approaches to prepare MoO3 thin films including sputtering, chemical vapor deposition, electro-deposition and evaporation. In particular, chemical vapor deposition has been regarded as a suitable technique which could induce a homogeneous thin film using vaporized phases. Crystalline molybdenum oxide presents either an orthorhombic structure (α-phase) or a monoclinic structure (β-phase) of the perovskite-like type; both structures are essentially built up of corner-sharing MoO6 octahedra. A layered oxygen deficient orthorhombic MoO3 (α-phase) and monoclinic MoO3 (β-phase) are found to exhibit optical switching upon thermal, photo or electric excitations. This optical modulation (colouration/bleaching) is effectively used in many applications like smart windows, anti dazzling coatings and display devices. Thus the synthesis of large area Mo-oxide thin films by an economical route and the structure tailoring of deposited material for the end application seems to be of prime importance. This paper deals with the detailed technological aspects of properties, different structures of MoO3 for the fabrication of all solid state lithium ion batteries with wide applications of MoO3 films as electrochromic display devices and gas sensors.


  1. Mahajan S.S., Mujawar S.H., Shinde P.S., Inamdar A.I. and Patil P.S., Concentration Dependent Structural, Optical and Electrochromic Properties of MoO Thin Films, Int. J. Electrochem. Sci., 3, 953-960 (2008)
  2. Nirupama V., Chandra Sekhar M., Subramanyam T. K. and Uthanna S., Structural and electrical characterization of magnetron sputtered MoO thin films, J. Phys. Conf. Ser., 208 012101-012106 (2010)
  3. Lee S. H., Seong M. J., Edwin Tracy C., Mascarenhas A., Roland Pitts J. and Satyen Deb K., Raman spectroscopic studies of electrochromic a-MoO thin films, Solid State Ionics,147 129–133 (2002)
  4. Diaz C., Lavayen V. and Dwyer C., Single-crystal micro and nanostructures and thin films of lamellar molybdenum oxide by solid-state pyrolysis of organometallic derivatives of a cyclotriphosphazene, J. Solid State Chem.,183, 1595–1603 (2010)
  5. Todd McEvoy M. and Keith Stevenson J., Electrochemical Preparation of Molybdenum Trioxide Thin Films: Effect of Sintering on Electrochromic and Electro insertion Properties, Langmuir, 19,4316-4326 (2003)
  6. Lee Y. J., Park C. W., Kim D. G., William Nichols T., Oh S. T. and Kim Y. D., MoO thin film synthesis by chemical vapor transport of volatile MoO(OH), J. Cer. Processing Resea.,11(1), 52-55 (2010)
  7. Gesheva K., Szekeres A. and Ivanova T., Optical properties of chemical vapor deposited thin films of molybdenum and tungsten based metal oxides, Solar Energy Materials & Solar Cells, 76, 563-576 (2003)
  8. Bouzidi A., Benramdane N., Tabet-Derraz H., Mathieu C., Khelifa B. and R. Desfeux, Effect of substrate temperature on the structural and optical properties of MoO thin films prepared by spray pyrolysis technique, J. Matt. Sci. Eng. B, 97, 5-8 (2003)
  9. Street S. C. and Goodman D. W., Chemical and spectroscopic surface science investigation of MoO and MoO/Al ultrathin films, J. Vac. Sci. Technol. A, 15(3), 1717-1723 (1997)
  10. Patil R. S., Uplane M. D. and Patil P. S., Electro synthesis of Electrochromic Molybdenum Oxide Thin Films with Rod-Like Features, Int. J. Electrochem. Sci., 3, 259-265(2008)
  11. Esmat Abdel-fattah Saad I., Dielectric properties of molybdenum oxide thin films, J. Optoelectronics and Adv. Matt.,7(5), 2743-2752 (2005)
  12. Kihlborg L., A Refinement of the crystal structure of Molybdenum trioxide, Ark. Kemi., 21, 471 (1963)
  13. David Scanlon O., Graeme Watson W., Payne D. J., Atkinson G. R., Egdell R. G. and Law D. S. L., Theoretical and Experimental Study of the Electronic Structures of MoO and MoO, J. Phys. Chem. C, 114, 4636-4645 (2010)
  14. Ivanova T., Szekeres A., Gartner M., Gogova D. and Gesheva K.A., Spectroscopic characterization of CVDmolybdenum oxide films, J. Electrochem. Acta.,46, 2215–2219 (2001)
  15. Tomas S.A., Arvizu M.A., Zelaya-Angel O. and Rodriguez P., Effect of ZnSe doping on the photochromic and thermochromic properties of MoO3 thin films, J. Thin Solid Films,518, 1332–1336 (2009)
  16. Esmat Abdel-fattah Saad I., Dielectric properties of molybdenum oxide thin films, J. Optoelectro. Adv. Matt.,7(5), 2743-2752 (2005)
  17. Li L., Guan M., Cao G., Li Y. and Zeng Y., Low operating-voltage and high power-efficiency OLED employing MoO-doped CuPc as hole injection layer, Displays, 33, 17-20 (2012)
  18. Comini E., Yubao L., Brando Y. and Sberveglieri G., Gas sensing properties of MoO nanorods to CO and CH3OH, J. Chem. Phy. Lett.,407, 368-371 (2005)
  19. Shrotriya V., Li G., Yao Y., Chu C. W. and Yang Y., Transition metal oxides as the buffer layer for polymer photovoltaic cells, J. Appl. Phys. Lett.,88, 073508(1-6) (2006)
  20. Arunkumar L., Vijayanand H., Basavaraja S. and Venkataraman A., Synthesis of MoO and its polyvinyl alcohol nanostructured film, Bull. Mater. Sci.,28(5), 477-481 (2005)
  21. Gaidelene J., Kuzmin A. and Purans J., Oxygen K-edge x-ray absorption near-edge structure in crystalline and amorphous molybdenum trioxides, J. Phys. Condens. Matter.,16, 6619-6625 (2004)
  22. Hsu C.S., Chan C.C., Huang H. T., Peng C. H. and Hsu W. C., Electrochromic properties of nanocrystalline MoO thin films, J. Thin Solid Films,516 4839-4844 (2008)
  23. Prasad A. K., Kubinski D. J. and Gouma P. I., Comparison of sol–gel and ion beam deposited MoO thin film gas sensors for selective ammonia detection, J. Sensors and ActuatorsB, 93 25–30 (2003)
  24. Sunu S.S., Prabhu E., Jayaraman V., Gnanasekar K. I. and Gnanasekaran T., Gas sensing properties of PLD made MoO films, Sensors and Actuators B, 94 189-196 (2003)