International E-publication: Publish Projects, Dissertation, Theses, Books, Souvenir, Conference Proceeding with ISBN.  International E-Bulletin: Information/News regarding: Academics and Research

Effect of Dopant Concentration on the Film Properties of In-doped ZnO thin Films Prepared by sol–gel Method

Author Affiliations

  • 1Hochiminh City University of Natural Resources and Environment (HCMUNRE), Hochiminh City, Vietnam

Res. J. Material Sci., Volume 4, Issue (7), Pages 1-5, August,16 (2016)

Abstract

We report on the effect of dopant concentration and substrate temperature on the electrical, optical and structural properties of In-doped ZnO thin films via sol-gel method using spin coating technique to tackle the problem of high instrumental costs for film deposition. In particular, the effect of In dopant concentration will study at wide range (from 1% up to 10%) by using spin coating technique in this work. The result shows that the substrate temperature at 430oC for deposited IZO film exhibited the lowest resistivity. The optimized condition for spin coating of IZO films at 5 at. % In doping which deposited at 430 °C exhibited lowest resistivity (5.58 x 10-3 &

References

  1. James A.O. and Akaranta O. (2011)., Inhibition of Corrosion of Zinc in Hydrochloric Acid Solution by Red Onion Skin Acetone Extract., Res. J. Chem. Sci.,1(1), 31-37.
  2. Girtan M., Socol M., Pattier B., Sylla M. and Stanculescu A. (2010)., On the structural, morphological, optical and electrical properties of sol–gel deposited ZnO:In films., Thin Solid Films 519, 573.
  3. Minami T. (2008)., Present status of transparent conducting oxide thin-film development for Indium-Tin-Oxide (ITO) substitutes., Thin Solid Films 516, 5822.
  4. Shanti E., Banerjee A. and Chopra K.L. (1983)., Highly transparent and conducting indium-doped zinc oxide films by spray pyrolysis., Thin Solid Films 108, 333.
  5. Chopra K.L., Major S. and Pandya D.K. (1983)., Transparent conductors-A status review., Thin Solid Films 102, 1.
  6. Barquinha P., Goncalves G., Pereira L., Martins R. and Fortunato E. (2007)., Effect of annealing temperature on the properties of IZO films and IZO based transparent TFTs., Thin Solid Films 515, 8450.
  7. Zhao J.L., Li X.M., Bian J.M., Yu W.D. and Gao X.D. (2005)., Structural, optical and electrical properties of ZnO films grown by pulsed laser deposition (PLD)., J. Cryst. Growth, 276, 507.
  8. Geng Y., Guo L., Xu S-S., Sun Q-Q., Ding S-J., Lu H-L., and Zhang D. W. (2011)., Influence of Al Doping on the Properties of ZnO Thin Films Grown by Atomic Layer Deposition., J. Phys. Chem. C, 115, 12317.
  9. Fay S., Steinhauser J., Nicolay S. and Ballif C. (2010)., Polycrystalline ZnO: B grown by LPCVD as TCO for thin film silicon solar cells., Thin Solid Films 518, 2961.
  10. Chen X.L., Xu B.H., Xue J.M., Zhao Y., Wei C.C., Sun J., Wang Y., Zhang X .D. and Geng X.H. (2007)., Boron-doped zinc oxide thin films for large-area solar cells grown by metal organic chemical vapor deposition., Thin Solid Films 515, 3753
  11. Farley N.R.S., Staddon C.R., Zhao L., Edmonds K.W., Gallaghera B.L. and Gregory. D.H. (2004)., Sol-gel formation of ordered nanostructured doped ZnO films., J. Mater. Chem., 14, 1087.
  12. Chen K.J., Hung F.Y., Chang S.J. and Hu. Z.S. (2009)., Microstructures, optical and electrical properties of In-doped ZnO thin films prepared by sol–gel method., Applied Surface Science, 255, 6308.
  13. Kyaw K. K., Wang Y., Zhao D. W., Huang Z. H., Zeng X. T. and Sun. X. W. (2011)., The properties of sol–gel processed indium-doped zinc oxide semiconductor film and its application in organic solar cells., Phys. Status Solidi A, 208, 2635.
  14. Jung Y. S., Seo J. Y., Lee D. W. and Jeon D. Y. (2003)., Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film., Thin Solid Film 445, 63.
  15. Park Y. R., Kim E. K., Jung D., Park T. S. and Kim Y. S. (2008)., Growth of transparent conducting nano-structured In doped ZnO thin films by pulsed DC magnetron sputtering., Appl. Surf. Sci. 254, 2250.
  16. Rozati S.M., Zarenejad F. and Memarian N. (2011)., Study on physical properties of indium-doped zinc oxide deposited by spray pyrolysis technique., Thin Solid Films 520, 1259.
  17. Maldonado A, J.Rodríguez-Baez and Olvera M. de la L (2011)., Physical properties of indium and fluorine codoped zinc oxide thin films deposited by chemical spray., Materials Chemistry and Physics 129, 109.
  18. Jung Y. S., Seo J. Y., Lee D. W. and Jeon D. Y. (2003)., Microstructural evolution in Al–Cu–Fe quasicrystalline thin films., Thin Solid Film, 445, 63
  19. Luna-Arredondo E.J., Maldonado A., Asomoza R., Acosta D.R., Meléndez-Lira M.A. and Olvera. M. de la L. (2005)., Indium-doped ZnO thin films deposited by the sol–gel technique., Thin Solid Films 490, 132.
  20. Lee Jin-Hong and Park. Byung-Ok (2003)., Transparent conducting ZnO:Al, In and Sn thin films deposited by the sol–gel method., Thin Solid Films, 426, 94.
  21. Castañeda L., Maldonado A., Escobedo-Morales A., Avendaño-Alejo M., Gómez H., Vega-Pérez J. and Olvera M. de la L. (2011)., Indium doped zinc oxide thin films deposited by ultrasonic spray pyrolysis technique: Effect of the substrate temperature on the physical properties., Materials Science in Semiconductor Processing, 14, 2011, 114.
  22. Jiao B.C., Zhang X.D., Wei C.C., Sun J., Huang Q. and Zhao Y. (2011)., Effect of acetic acid on ZnO:In transparent conductive oxide prepared by ultrasonic spray pyrolysis., Thin Solid Films 520, 1323.
  23. Hafdallah A, Yanineb F., Aida M.S. and Attaf N. (2011)., In doped ZnO thin films., Journal of Alloys and Compounds, 509, 7267.
  24. Jiménez-González AE, Soto Urueta Jose A. and Suárez-Parra R. (1998)., Changes of structural, optical and electrical properties of sol-gel derived ZnO films with their thickness., J Cryst. Growth., 192, 430.
  25. Li H., Wang J., Liu H., Yang C., Xu H., Li X. and Cui H. (2004)., Sol–gel preparation of transparent zinc oxide films with highly preferential crystal orientation., Vacuum 77, 57
  26. Cullity B.D. (1978)., The Elements of X-ray Diffraction, Addison-Wesley., Reading, MA, 1978, 102.